吴涛，上海科技大学信息学院助理教授研究员、博导。 

2007年本科毕业于浙江大学，2011年12月博士毕业于美国加州大学洛杉矶分校。吴博士毕业后曾供职于英特尔，负责先进CMOS制程下的金属与氧化物原子层沉积工艺；之后以博士后研究员身份加入斯坦福大学和美国东北大学，负责微型曲面图像传感器、近零功耗压电射频器件和传感系统的研发。吴博士于2017年7月加入上海科技大学，建立了上科大微系统与先进传感器实验室(SMALL)。课题组科研方向包括多铁态多微纳尺度下的耦合机理与器件，微纳机电系统MEMS/NEMS，磁电/声学微纳器件，以及MEMS-CMOS集成微系统。已经在包括(Nature) Microsystems & Nanoengineering， ACS Nano，IEEE Electron Device Letters，Nature Communication，Applied Physics Letter，Physical Review Letter，Journal of Microelectromechanical Systems， IEEE MEMS，TRANSDUCERS，SENSORS，ISCAS等国际著名期刊和会议上发表学术论文80余篇， H因子为21。吴博士长期受邀担任多种国际知名期刊和会议的审稿人，先后主持了国家自然科学基金、上海市科委等多项科研项目。

SMALL课题组研究方向包括压电声学微纳机电系统（RF MEMS & PMUT），先进微纳加工工艺，磁电/声光传感器与微系统；欢迎对多学科交叉感兴趣的理工科背景学生加入。

材料器件中心专硕招生专业：（085400，专业学位）电子信息

招生年度：2024年起

• 1. 邵率*, Shao, Shuai;Wu, Tao;, Shao, Shuai;Luo, Zhifang;Lu, Yuan;Mazzalai, Andrea;Tosi, Carlo;Wu, Tao#, High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 01 Jun 2022,

• 2. 吴声*, Wu, Sheng;Li, Wei;Jiao, Ding;Yang, Heng;Wu, Tao;Li, Xinxin#, An Aluminum-Nitride PMUT with Pre-Concaved Membrane for Large Deformation and High Quality-Factor Performance, 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2021, 20 Jun 2021, 46-49

• 3. 邵率*, Shao, Shuai;, Shao, Shuai;Luo, Zhifang;Wu, Tao#, DESIGN AND FABRICATION OF LAMB WAVE RESONATOR BASED ON 15% SCANDIUM-DOPED ALUMINUM NITRIDE THIN FILM, 2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, 1371-1374

• 4. 罗智方*, Luo, Zhifang;, Luo, Zhifang;Shao, Shuai;Wu, Tao#, OPTIMIZATION OF ALN AND ALSCN FILM ICP ETCHING, 2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), 2021, 2021-January:638-641

• 5. 吴声*, Wu, Sheng;Li, Wei;Jiao, Ding;Yang, Heng;Wu, Tao;Li, Xinxin#, AN ALUMINUM-NITRIDE PMUT WITH PRE-CONCAVED MEMBRANE FOR LARGE DEFORMATION AND HIGH QUALITY-FACTOR PERFORMANCE, 2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, 46-49

• 6. 李嘉年*, Wang, Xiong;, Li, Jianian;Wang, Baosheng;Zhang, Dajun;Li, Chenzhe;Zhu, Yihui;Zou, Yi;Chen, Baile;Wu, Tao;Wang, Xiong#, A Preclinical System Prototype for Focused Microwave Breast Hyperthermia Guided by Compressive Thermoacoustic Tomography, IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, Jul 2021, 68(7):2289-2300

• 7. 邵率*, Wu, Tao;, Shao, Shuai;Luo, Zhifang;Wu, Tao#, High Figure-of-Merit Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Film, IEEE ELECTRON DEVICE LETTERS, Sep 2021, 42(9):1378-1381

• 8. 吴涛*, Wu, T.;, Wu, T.;Chen, G.;Qian, Z.;Zhu, W.;Rinaldi, M.;McGruer, N.#, A MICROELECTROMECHANICAL ALN RESOSWITCH FOR RF RECEIVER APPLICATION, 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, 2123-2126

• 9. Li, Ming-Huang*, Li, Ming-Huang;, Li, Ming-Huang;Chen, Chao-Yu;Lu, Ruochen;Yang, Yansong;Wu, Tao;Gong, Songbin#, Temperature Stability Analysis of Thin-Film Lithium Niobate SH0 Plate Wave Resonators, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct 2019, 28(5):799-809

• 10. Anming Gao*, Anming Gao;Jie Zou;Tao Wu#, Narrowband Impedance Transformer With Extremely High Transformation Ratio of 200, IEEE ELECTRON DEVICE LETTERS, Nov 2019, 40(11):1820-1823

• 11. Wang, Ji Qian*, Wang, Ji Qian;Zhang, Zi Dong;Yu, Si Yuan;Ge, Hao;Liu, Kang Fu;Wu, Tao;Sun, Xiao Chen;Liu, Le;Chen, Hua Yang;He, Cheng;Lu, Ming Hui;Chen, Yan Feng#, Extended topological valley-locked surface acoustic waves, NATURE COMMUNICATIONS, 14 Mar 2022, 13(1)

• 12. Yadagiri Karampuri*, Yadagiri, K.;Wu, T.;, Yadagiri, K.;Wu, T.#, The thickness of buffer layer and temperature dependent magneto dynamic properties of Ta/FeGaB/Ta tri-layer, JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 01 Dec 2020, 515

• 13. 罗智方*, Luo, Zhifang;Wu, Tao;, Luo, Zhifang;Shao, Shuai;Wu, Tao#, Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication, MICROELECTRONIC ENGINEERING, 15 Apr 2021, 242

• 14. 吴涛*, Tao Wu;Ruochen Lu;Anming Gao;Cheng Tu;Tomás Manzaneque;Songbin Gong#, A Chip-Scale RF MEMS Gyrator via Hybridizing Lorentz-Force and Piezoelectric Transductions, 2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Jan 2019, 887-890

• 15. Gao, Anming*, Wu, Tao;, Gao, Anming;Liu, Kangfu;Liang, Junrui;Wu, Tao#, AlN MEMS filters with extremely high bandwidth widening capability, MICROSYSTEMS & NANOENGINEERING, 07 Sep 2020, 6(1)

• 16. Ming-Huang Li*, Ming-Huang Li;Chao-Yu Chen;Ruochen Lu;Yansong Yang;Tao Wu;Songbin Gong#, Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation, 2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Jan 2019, 911-914

• 17. Qin, Zhen-Hui*, Yu, Si-Yuan;Chen, Yan-Feng;, Qin, Zhen-Hui;Wu, Shu-Mao;Wang, Yong;Liu, Kang-Fu;Wu, Tao;Yu, Si-Yuan;Chen, Yan-Feng#, Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film, MICROMACHINES, Sep 2021, 12(9)

• 18. 刘玉帅*, Liu, Yushuai;Gao, Zhiyuan;Liu, Kangfu;Wu, Tao#, TORSIONAL MEMS SCANNER BASED ON LiNbO3 THIN FILM, 2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, 631-634

• 19. Zhang, Zi-Dong*, Yu, Si-Yuan;Lu, Ming-Hui;Chen, Yan-Feng;, Zhang, Zi-Dong;Yu, Si-Yuan;Ge, Hao;Wang, Ji-Qian;Wang, Hong-Fei;Liu, Kang-Fu;Wu, Tao;He, Cheng;Lu, Ming-Hui;Chen, Yan-Feng#, Topological Surface Acoustic Waves, PHYSICAL REVIEW APPLIED, 07 Oct 2021, 16(4)

• 20. 罗智方*, Luo, Zhifang;Wu, Tao;, Luo, Zhifang;Shao, Shuai;Liu, Kangfu;Lu, Yuan;Mazzalai, Andrea;Tosi, Carlo;Wu, Tao#, Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·qm) over 146, APPLIED PHYSICS LETTERS, 25 Apr 2022, 120(17)

• 21. 刘一鹏*, Fu, Minfan;, Liu, Yipeng;Wu, Tao;Fu, Minfan#, Interleaved Capacitive Coupler for Wireless Power Transfer, IEEE TRANSACTIONS ON POWER ELECTRONICS, Dec 2021, 36(12):13526-13535

• 22. 吴进波*, Zhang, Shibin;Wu, Tao;Ou, Xin;, Wu, Jinbo;Zhang, Shibin;Zhou, Hongyan;Zheng, Pengcheng;Zhang, Liping;Li, Zhongxu;Wang, Yuxi;You, Tiangui;Huang, Kai;Wu, Tao;Ou, Xin#, A New Class of High-Overtone Bulk Acoustic Resonators Using Lithium Niobate on Conductive Silicon Carbide, IEEE ELECTRON DEVICE LETTERS, Jul 2021, 42(7):1061-1064

• 23. 吴鹏*, Wu, Peng;Yan, Jun;Wu, Tao;, Wu, Peng;Yan, Jun;Liang, Pengli;Zhu, Zhifeng;Wu, Tao#, Magnetic Field-Oriented Electrical Transport Properties in Antiperovskite Mn3SnC, PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, Apr 2022,

• 24. 吴涛*, Wu, Tao;, Wu, Tao;Qian, Zhenyun;Rinaldi, Matteo#, LOW COST THIN FILM ENCAPSULATION FOR ALN RESONATORS, 2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, 2018-January:1024-1027

• 25. Domann, John*, Domann, John;, Domann, John;Wu, Tao;Chung, Tien-Kan;Carman, Greg#, Strain-mediated magnetoelectric storage, transmission, and processing: Putting the squeeze on data, MRS BULLETIN, Nov 2018, 43(11):848-853

• 26. 王宇茜*, Wu, Tao;, Wang, Yuxi;Yadagiri, Karampuri;Wu, Peng;Wu, Tao#, Temperature dependent magnetostatic and dynamic properties of soft magnetic FeGaB/Al2O3thin films for microwave applications, AIP ADVANCES, 01 Mar 2022, 12(3)

• 27. Ahmed Emad*, Ahmed Emad;Ruochen Lu;Ming-Huang Li;Yansong Yang;Tao Wu;Songbin Gong#, Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate, 2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Jan 2019, 282-285

• 28. 邵率*, Shao, Shuai;, Shao, Shuai;Gao, Anming;Wang, Yuxi;Wu, Tao#, Wide Bandwidth Lorentz-Force Magnetometer Based on Lateral Overtone Bulk Acoustic Resonator, PROCEEDINGS OF THE IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 25 Jan 2021, 2021-January:879-882

• 29. 邵率*, Wu, Tao;, Shao, Shuai;Luo, Zhifang;Lu, Yuan;Mazzalai, Andrea;Tosi, Carlo;Wu, Tao#, Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines, IEEE ELECTRON DEVICE LETTERS, 01 Apr 2022, 43(4)

• 30. 吴进波*, Zhang, Shibin;Wu, Tao;Ou, Xin;, Wu, Jinbo;Zhang, Shibin;Zhou, Hongyan;Zhang, Liping;Zheng, Pengcheng;Yao, Hulin;Zhao, Xiaomeng;Huang, Kai;Wu, Tao;Ou, Xin#, Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate, IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES, 2022, 2022-January:1026-1029

• 31. 蔡俊翔*, Cai, Junxiang;Wang, Yiyun;, Cai, Junxiang;Wang, Yiyun;Lou, Liang;Zhang, Songsong;Gu, Yuandong;Gao, Fei;Wu, Tao#, Photoacoustic and Ultrosound Dual-Modality Endoscopic Imaging Based on ALN Pmut Array, IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES, 2022, 2022-January:412-415

• 32. 刘玉帅*, Liu, Yushuai;Gao, Zhiyuan;Liu, Kangfu;Wu, Tao#, Torsional MEMS Scanner Based on LiNbO3 Thin Film, 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2021, 20 Jun 2021, 631-634

• 33. Wu, Jinbo*, Zhang, Shibin;Ou, Xin;, Wu, Jinbo;Zhang, Shibin;Chen, Yang;Zheng, Pengcheng;Zhang, Liping;Yao, Hulin;Li, Zhongxu;Zhao, Xiaomeng;Huang, Kai;Wu, Tao;Ou, Xin#, Advanced Surface Acoustic Wave Resonators on LiTaO3/SiO2/sapphire Substrate, IEEE ELECTRON DEVICE LETTERS, 01 Oct 2022, 1-1

• 34. 吴进波*, Zhang, Shibin;Ou, Xin;, Wu, Jinbo;Zhang, Shibin;Zhang, Liping;Zhou, Hongyan;Zheng, Pengcheng;Yao, Hulin;Li, Zhongxu;Huang, Kai;Wu, Tao;Ou, Xin#, Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates, IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, 01 Aug 2022, 69(8):1-1

• 35. 陆瑶卿*, Liu, Kangfu;Wu, Tao;, Lu, Yaoqing;Liu, Kangfu;Wu, Tao#, Dual-Axis MEMS Resonant Scanner Using 128(circle)Y Lithium Niobate Thin-Film, ACOUSTICS, Jun 2022, 4(2):313-328

• 36. 钱益军*, Lu, Kai;Wei, Xing;Yang, Yumeng;, Qian, Yijun;Gao, Yuan;Shukla, Amit Kumar;Sun, Lu;Zou, Xinbo;Wu, Tao;Mu, Zhiqiang;Lu, Kai;Dong, Yemin;Wei, Xing;Yang, Yumeng#, Analysis of Abnormal GIDL Current Degradation Under Hot Carrier Stress in DSOI-MOSFETs, IEEE TRANSACTIONS ON ELECTRON DEVICES, 01 Nov 2022,

• 37. 潘正卿*, Yu, Jingyi;Li, Shiying;, Pan, Zhengqing;Li, Ruiqian;Gao, Tian;Wang, Zi;Shen, Siyuan;Liu, Ping;Wu, Tao;Yu, Jingyi;Li, Shiying#, Onsite Non-Line-of-Sight Imaging via Online Calibration, IEEE PHOTONICS JOURNAL, 01 Oct 2022, 14(5)

• 38. 蔡俊翔*, Lou, Liang;Gao, Fei;Wu, Tao;, Cai, Junxiang;Wang, Yiyun;Jiang, Daohuai;Zhang, Songsong;Gu, Yuandong Alex;Lou, Liang;Gao, Fei;Wu, Tao#, Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging, MICROSYSTEMS & NANOENGINEERING, Dec 2022, 8(1)

• 39. 刘康福*, Kangfu Liu;Yaoqing Lu;Tao Wu#, 7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator, IEEE ELECTRON DEVICE LETTERS, Feb 2023, 44(2)

• 40. 邵率*, Shao, Shuai;Wu, Tao;, Shao, Shuai;Luo, Zhifang;Liu, Kangfu;Wu, Tao#, Lorentz-force gyrator based on AlScN piezoelectric thin film, APPLIED PHYSICS LETTERS, 21 Nov 2022, 121(21)

• 41. 罗智方*, Wu, Tao;, Luo, Zhifang;Shao, Shuai;Wu, Tao#, Al0.78Sc0.22N Lamb Wave Contour Mode Resonators, IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Nov 2022, 69(11)

• 42. 王怡韵*, Wu, Tao;Gao, Fei;, Wang, Yiyun;Cai, Junxiang;Wu, Tao;Gao, Fei#, Photoacoustic Dual-mode Microsensor Based on PMUT Technology, PROCEEDINGS - IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, 2022, 2022-May:2836-2840